Electron capture behaviors of deep level traps in unintentionally doped and intentionally doped n-type GaN

In n-type GaN films grown on sapphire substrates by metal-organic chemical vapor deposition such as unintentionally GaN and intentionally Si-doped GaN and In-doped GaN, the electron capture behaviors were investigated by deep level transient spectroscopy with various filling pulse durations. Two distinct deep levels E1 and E2 were typically observed in unintentionally doped n-type GaN. After optimized growth of undoped GaN, deep level E1 disappears. With increasing Si doping, the trap concentration of deep level E2 is increased. However, In doping in n-type GaN growth was found to suppress the formation of deep level E2. The electrons captured at the traps E1 and E2 were found to depend logarithmically on the duration time of the filling pulse. From an analysis of a model involving barrier-limited capture rate, it can be concluded that deep level E1 is associated with linear line defects along dislocation cores while deep level E2 is related to point defects.