Synapse
⌘+K
Synapse
PulseExploreClubsResearchersJournals
Instagram
HomeClubsExplore
April 1, 1983Japanese Journal of Applied PhysicsOpen Access

Au–Si–Be Liquid Metal Ion Source for Maskless Ion Implantation

View Full Paper
Ask AI
Bookmark
Share

Authors

EHE HashimotoKyorin UniversityTUTakao UtsumiChiba University

Discussion

Loading...

Member takes

Overview

Key Points

Key points are not available for this paper at this time.

Cite This Study

Hashimoto et al. (1983) studied this question.

synapsesocial.com/papers/6a95b1e454b0eb02e36287c7https://doi.org/10.1143/jjap.22.l225
View Full Paper
Ask AI
Bookmark
Share

Also Consider

Synapse has enriched 4 closely related papers on similar clinical questions. Consider them for comparative context:

  1. 1A high-intensity scanning ion probe with submicrometer spot size1979 · 269 citations
  2. 2Field-emission liquid-metal ion source and triode ion gun1981 · 12 citations
  3. 3Liquid metal alloy ion sources for B, Sb, and Si1981 · 63 citations
  4. 4FET fabrication using maskless ion implantation1981 · 76 citations