Dielectric and piezoelectric thin films play an important role in high performance thin film functional modules. In this paper sol-gel and modified sol-gel processes for oxide films such as Ta2O5, Ta2O5 - Al2O3, as well as complex oxide films such as BiNbO4, Ba1-xSrxTiO3, PbZrxTixO3 will be discussed. The realisation of HF-modules and HF-resonators will be demonstrated.
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Klee et al. (2001) studied this question.
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