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Chemical–Mechanical Lift-Off Process for InGaN Epitaxial Layers, Lin, Ming-Shiou, Lin, Chia-Feng, Huang, Wan-Chun, Wang, Guei-Miao, Shieh, Bing-Cheng, Dai, Jing-Jie, Chang, Shou-Yi, Wuu, D. S., Liu, Po-Liang, Horng, Ray-Hua
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Lin et al. (2011) studied this question.
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