DIELECTRIC RESPONSE OF VARIABLE THICKNESS Ba0.6Sr0.4TiO3 FILMS FOR PROPERTY-SPECIFIC DEVICE APPLICATIONS

The dielectric properties of barium strontium titanate thin films with composition Ba0.6Sr0.4TiO3 were studied as a function of film thickness for implementation in a variety of devices with different requirements. Films were prepared by metalorganic solution deposition and characterized using scanning electron microscopy, atomic force microscopy, and Rutherford back-scattering. The dielectric (100 kHz) and insulating properties were also measured. The film morphology and dielectric/insulating properties are thickness dependent, yet the best combination of properties was in films of 160 nm to 240 nm. These films had a moderate dielectric constant (∼300), low loss (∼ 0.029), good tunability (∼ 30%), and low leakage current (∼ 10− 8 A/cm2).