Large‐Area Synthesis of Carbon Nanofibers by Low‐Power Microwave Plasma‐Assisted CVD

Novel antenna edge microwave plasma CVD (AE‐MPCVD) is used for the first time to grow CNFs (carbon nanofibers). The synthesis of CNFs on large‐area substrates with high growth reproducibility is reported at low microwave power input and with remote deposition. A growth area ten times as large as the plasma size generated is achieved by AE‐MPCVD. Because of its structural simplicity, AE‐MPCVD systems can easily be scaled up by applying multi‐antenna edge arrays without considering complex microwave geometry or cavity and the total growth area and quality of CNFs are thus expected to be greatly improved.