Etching of nanopatterns in silicon using nanopantography

This is the authors' abstract. We don't add key points for this paper.

Nanopantography is a technique for parallel writing of nanopatterns over large areas. A broad ion beam impinges on a substrate containing many microfabricated electrostatic lenses that focus ions to spots at the substrate surface. Here, etching of nanopatterns is demonstrated. The substrate was continuously titled about x and y axes with 0.11° precision, corresponding to a translation of the ion foci of 1.5nm on the substrate. With tilting in one direction, 15nm full width at half maximum trenches 45nm deep were etched into a Si wafer using an Ar+ beam in a Cl2 ambient. T-shaped patterns were etched by tilting the substrates in two directions.