Improved Performance of Plasma-Assisted Molecular Beam Epitaxy Grown AlGaN/GaN High Electron Mobility Transistors with Gate-Recess and CF4-Treatment, Chu, Rongming, Poblenz, Christiane, Wong, Man Hoi, Dasgupta, Sansaptak, Rajan, Siddharth, Pei, Yi, Recht, Felix, Shen, Likun, Speck, James S., Mishra, Umesh K.
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Chu et al. (2008) studied this question.
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