Laserannealing studies of barium strontium titanate thin films using short laser pulses

Laser annealing studies on CSD derived (Ba, Sr)TiO3 thin films were performed using a KrF-Excimer laser emitting light at a wavelength of λ=248nm with pulse duration of λ=20ns. The pulse energies and the number of pulses within one crystallization process were varied over a range of 10mJ/cm2 to 200mJ/cm2 and 10 to 10000 pulses. The appearance of crystallization was identified using microstructural analytical methods. The crystallization depth obtained was in the range of 30–150nm. Several different kinds of damage were identified depending on the laser and deposition parameters. The experimental results are interpreted by modeling of the heat distribution in the material using finite element method.