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September 3, 1990Applied Physics Letters

Bistable conditions for low-temperature silicon epitaxy

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Authors

BMB.S. MeyersonJohannes Kepler University of LinzFHF. J. HimpselUniversity of Wisconsin–MadisonKUKevin J. UramIBM (United States)

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Meyerson et al. (1990) studied this question.

synapsesocial.com/papers/6a838660d00caa0920fd6f0dhttps://doi.org/10.1063/1.103557
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