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January 1, 1986IEEE Transactions on Plasma Science

Particle Distributions and Laser-Particle Interactions in an RF Discharge of Silane

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Authors

KSKenneth G. SpearsUniversity of MichiganTRTimothy J. RobinsonYale UniversityRRRichard M. RothColorado Permanente Medical Group

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Cite This Study

Spears et al. (1986) studied this question.

synapsesocial.com/papers/6a87fe27c16cbaca05f4c8b0https://doi.org/10.1109/tps.1986.4316521
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