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July 15, 1989Journal of Applied Physics

Evaluation of crystalline quality of heteroepitaxial yttria-stabilized zirconia films on silicon by means of ion beam channeling

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Authors

HFHirofumi FukumotoNagoya UniversityTITakeshi ImuraHiroshima UniversityYÔYukio ÔsakaHiroshima University

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Fukumoto et al. (1989) studied this question.

synapsesocial.com/papers/6a882e244c49f9752a14bc2chttps://doi.org/10.1063/1.344457
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  1. 1The structure of cubic ZrO<sub>2</sub>:YO<sub>1.5</sub>solid solutions by neutron scattering1974 · 214 citations
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  3. 3Separate estimate of crystalline orientations and scattering centers in polycrystals by backscattering technique1976 · 49 citations
  4. 4Heteroepitaxial Growth of Yttria-Stabilized Zirconia (YSZ) on Silicon1988 · 88 citations
  5. 5Formation of High-Tc Superconducting BiSrCaCu2Ox Films on ZrO2/Si(100)1988 · 15 citations