Pb(ZrxTi1−x)O3 (PZT) thin films have been prepared on Pt/MgO substrates by vacuum evaporation technique using PbO and ZrO2/TiO2 pellets as source materials. Good quality PZT can be obtained by employing Two-step evaporation method, where only PbO is evaporated at first before the PZT evaporation. Remanent polarizations of 17–29 μC/cm2 and coercive fields of 45–126 kV/cm are obtained.
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Tokumitsu et al. (1995) studied this question.
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