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August 1, 1993Japanese Journal of Applied PhysicsOpen Access

Control of Fluorocarbon Radicals by On-Off Modulated Electron Cyclotron Resonance Plasma

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Authors

KTKunimasa TakahashiAkebono (Japan)MHMasaru HoriNagoya UniversityTGToshio GotoMassachusetts General Hospital

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Takahashi et al. (1993) studied this question.

synapsesocial.com/papers/6a9eefc28f37065ff4e988d4https://doi.org/10.1143/jjap.32.l1088
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