Growth of BaTiO3/SrTiO3 superlattices by injection MOCVD

BaTiO3 (BTO) and SrTiO3 (STO) and BaxSr1-xTiO3 (x=0–1) (BST) thin films have been epitaxially grown on LaAlO3 and SrTiO3:Nb at a substrate temperature of 800°C using a new liquid source delivery technique called injection MOCVD. A X-ray study evidenced FWHMs of 0.16° and 0.45° for SrTiO3 and BaTiO3 respectively. In a next step the feasibility of BaTiO3/SrTiO3 superlattices was studied. The multilayers obtained were epitaxially grown on LaAlO3 as well as on SrTiO3:Nb. The structural properties were studied using X-ray diffraction as well as XPS, proving the low interface roughness of 1nm. The XPS study also confirmed the absence of carbon contamination in the film.