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February 1, 2024IEEE Electron Device LettersOpen Access

2 kV Enhancement-Mode p-GaN Gate HEMTs on 200 mm Engineered Substrates

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Authors

SKS. KumarIMECKGKaren GeensIMECAVAnurag VohraIMEC

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Implication

Experimental study demonstrates 1.2 kV enhancement-mode p-GaN HEMTs on 200 mm engineered substrates, indicating high uniformity and reliability for power electronics.

Key Points

  • To fabricate and evaluate 1.2 kV normally-off lateral p-GaN high-electron-mobility transistors on large-diameter 200 mm engineered substrates.
  • Fabricated enhancement-mode p-GaN gate lateral HEMTs on 200 mm engineered substrates using optimized gate-drain spacing.
  • Characterized electrical parameters across the wafer, including threshold voltage, specific ON-resistance, and hard breakdown voltage.
  • Conducted on-wafer high-temperature gate bias (HTGB) and reverse-bias stress testing to assess device stability.
  • Optimized transistors achieved a threshold voltage of 3.2 V, an ON/OFF current ratio of 10⁸, a low specific ON-resistance of 5.8 mΩ·cm², and a hard breakdown voltage of 1800 V.
  • Devices exhibited high wafer-scale uniformity with an ON-resistance variation (σ_Ron) of 1.2%.
  • Transistors successfully passed on-wafer HTGB and reverse-bias stress tests with zero recorded device failures.

Cite This Study

Kumar et al. (2024) studied this question.

synapsesocial.com/papers/6aa8518e5d9410427ecdf0d1https://doi.org/10.1109/led.2024.3361164
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