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October 1, 1977Journal of Applied Physics

Reordering of amorphous layers of Si implanted with 31P, 75As, and 11B ions

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Authors

LCL. CsepregiFraunhofer SocietyEKEamonn KennedyUniversity of UtahTGT. J. GallagherUniversity College Dublin

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Csepregi et al. (1977) studied this question.

synapsesocial.com/papers/6a7127ffa528af2d65c3f04fhttps://doi.org/10.1063/1.323408
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