Synapse
⌘+K
Synapse
PulseExploreClubsResearchersJournals
Instagram
HomeClubsExplore
October 15, 1986Journal of Applied Physics

Laser-induced fluorescence measurement and analytical model for the reaction probability of CF2 on Si

View Full Paper
Ask AI
Bookmark
Share

Authors

JTJohn W. ThomanWilliams CollegeKSKatsunori SuzukiHamamatsu University School of MedicineSKScott H. KableUNSW Sydney

Discussion

Loading...

Member takes

Overview

Key Points

Key points are not available for this paper at this time.

Cite This Study

Thoman et al. (1986) studied this question.

synapsesocial.com/papers/6a87ff4da082a64c2914b59dhttps://doi.org/10.1063/1.337110
View Full Paper
Ask AI
Bookmark
Share

Also Consider

Synapse has enriched 5 closely related papers on similar clinical questions. Consider them for comparative context:

  1. 1The reaction of fluorine atoms with silicon1981 · 336 citations
  2. 2Diagnostics of microwave plasma by laser induced fluorescence1986 · 20 citations
  3. 3Molecular Theory of Gases and Liquids1955 · 11,431 citations
  4. 4Detection of CF2 radicals in a plasma etching reactor by laser-induced fluorescence spectroscopy1982 · 71 citations
  5. 5A Mathematical Model of the Coupled Fluid Mechanics and Chemical Kinetics in a Chemical Vapor Deposition Reactor1984 · 343 citations