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August 1, 2026Bulletin of the Russian Academy of Sciences Physics

Influence of the Composition of the Gas Medium in Reactive Ion-Beam Sputtering on the Electrical Properties of Nitrogen-Doped ZnO Films

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Authors

ВМВ. А. МакагоновКГК. С. ГабриельсYKYu. E. Kalinin

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Макагонов et al. (2026) studied this question.

synapsesocial.com/papers/6a9742b4a717872308af0372https://doi.org/10.1134/s1062873826701145
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