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March 1, 1991Journal of Applied Physics

Angular ion and neutral energy distribution in a collisional rf sheath

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Authors

AMA. ManenschijnWGW. J. GoedheerLeiden University

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Manenschijn et al. (1991) studied this question.

synapsesocial.com/papers/6a9a92400decd5d9573471d7https://doi.org/10.1063/1.348602
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