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March 1, 1997Journal of Applied Physics

CF2 kinetics and related mechanisms in the presence of polymers in fluorocarbon plasmas

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ATA. TserepiNational Centre of Scientific Research "Demokritos"JDJacques DerouardLaboratoire Interdisciplinaire de PhysiqueJBJean‐Paul BoothCentre National de la Recherche Scientifique

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Tserepi et al. (1997) studied this question.

synapsesocial.com/papers/6a9bd57a0b073dbbe4b20ef8https://doi.org/10.1063/1.364255
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