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July 1, 1994Japanese Journal of Applied Physics

CFX(X=1–3) Radicals Controlled by On-Off Modulated Electron Cyclotron Resonance Plasma and Their Effects on Polymer Film Deposition

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Authors

KTKunimasa TakahashiAkebono (Japan)MHMasaru HoriNagoya UniversitySKShigeru KishimotoNagoya University

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Takahashi et al. (1994) studied this question.

synapsesocial.com/papers/6ab6039665d06effd520acedhttps://doi.org/10.1143/jjap.33.4181
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